Efficient Microvalve Driven by a Si-Ni Bimorph

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-07-15

著者

• Yoshida Hitoshi

  Matsushita Electric Works Ltd.

• Kawada Hiroshi

  Matsushita Electric Works Ltd.

• Saitoh Masaaki

  Matsushita Electric Works Ltd.

• Yoshida Kazushi

  Matsushita Electric Works Ltd.

• TOMONARI Shigeaki

  Matsushita Electric Works, Ltd.

• KAMAKURA Masanao

  Matsushita Electric Works, Ltd.

• KAWAHITO Keiko

  Matsushita Electric Works, Ltd.

• JUODKAZIS Saulius

  The University of Tokushima

• MISAWA Hiroaki

  The University of Tokushima

関連論文

• Efficient Microvalve Driven by a Si-Ni Bimorph
• Miniaturization of a Thermally Driven Ni|Si Bimorph
• Efficient microvalve driven by a Si-Ni bimorph

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