Dependence of Magnetic Properties on Sputtering Pressure for Fe–Al–O Alloy Films Made by Carousel-Type Sputtering

概要

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We have investigated the magnetic anisotropy and permeability of FeAlO films with $B_{\text{s}}\sim 1.8$ T and $\rho\sim 1$ μ$\Omega$m. The films were prepared using a carousel-type sputtering system. Although an aligning magnetic field to induce uniaxial magnetic anisotropy was not applied to the substrates during deposition, the FeAlO films in the as-deposited state had uniaxial magnetic anisotropy. The anisotropy strongly depends on sputtering pressure. The direction of the magnetic anisotropy shifts 90° from the rotation direction to the radial direction of the substrate holder as the sputtering pressure increases. In the pressure range of 0.3–0.4 Pa, the measured $\mu$–$f$ properties are largely different from the theoretical one because of magnetic anisotropy dispersion. The anisotropy dispersion can be explained by a model with two orthogonal anisotropy components.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-07-15