Dependence of Plasma Density on Driving Frequency in Conventional Capacitively Coupled Discharges at Higher Frequencies
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概要
- 論文の詳細を見る
It has been predicted numerically that plasma density may be proportional to ${f_0}^{2.4}$ ($f_0$: driving frequency) between 80 and 500 MHz for conventional capacitively coupled discharges under constant applied voltage and gas pressure. The results also predict that the normalized electron energy distribution may not significantly change between 80 and 500 MHz.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-07-15
著者
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Kogoshi Sumio
Department Of Electrical Engineering Faculty Of Science And Engineering Science University Of Tokyo
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Kikuchi Takahito
Department of Electrical Engineering, Faculty of Science and Technology, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan
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