Dependence of Plasma Density on Air Gap Length of Resonant Cavity with Bottom Plate Replaced by High-Density Plasma
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概要
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To excite selectively transverse magnetic (TM) waves and to maximize E-field of a microwave oriented parallel to the plasma density gradient at a plasma surface, a resonant cavity was formed using an air gap between an upper conduction plate with a slot antenna (part of a waveguide) and a dielectric window of a microwave plasma source, in which a high-density plasma has been shown to act as the bottom plate of the cavity. The local maxima of plasma density have been observed experimentally when changing the air gap length. Finite-difference time-domain (FDTD) simulations and analytical studies show that two of these maxima may be due to the formation of TM111 and TM112 wave resonant cavities.
- 2009-08-25
著者
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Katayama Noboru
Department Of Applied Biological Sciences Faculty Of Agriculture Saga University
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Kogoshi Sumio
Department Of Electrical Engineering Faculty Of Science And Engineering Science University Of Tokyo
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Kudo Yusuke
Department Of Electrical Engineering Yamagata University
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Yoshioka Yu
Department Of Applied Biological Science Kagawa University
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Kogoshi Sumio
Department of Electrical Engineering, Faculty of Science and Technology, Tokyo University of Science, Noda, Chiba 278-8510, Japan
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Yoshioka Yu
Department of Electrical Engineering, Faculty of Science and Technology, Tokyo University of Science, Noda, Chiba 278-8510, Japan
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