Mechanism of Macropore Formation in Anodized p-Type Silicon
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概要
- 論文の詳細を見る
The mechanism of macropore formation in anodized p-type Si was studied using an aqueous HF solution. The depth profile of the anodized surface and the dissolution valence were investigated by varying anodic time. The dissolution valence increased at the initial stage of anodization and decreased after macropore formation. The experimental results are explained with the electrochemical reaction model, which describes that F- and OH- react with Si mainly at the bottom and the top of the macropore, respectively.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-06-15
著者
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Hosono Akihiko
Mitsubishi Electric Corp.
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Okuda Soichiro
Mitsubishi Electric Corp.
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NAKAMURA Mitsuhiro
Faculty of Science and Engineering, Shimane University
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MASHIMO Mariko
Mitsubishi Electric Corp.
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Ohwada Takafumi
Faculty Of Science And Engineering Shimane University
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Harada Hiroshi
Faculty Of Agriculture University Of Miyazaki
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Okuda Soichiro
Mitsubishi Electric Corp., 8-1-1 Tsukaguchi-honmachi, Amagasaki, Hyogo 661-8661, Japan
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Hosono Akihiko
Mitsubishi Electric Corp., 8-1-1 Tsukaguchi-honmachi, Amagasaki, Hyogo 661-8661, Japan
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Mashimo Mariko
Mitsubishi Electric Corp., 8-1-1 Tsukaguchi-honmachi, Amagasaki, Hyogo 661-8661, Japan
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NAKAMURA Mitsuhiro
Faculty of Nursing, Tokyo Ariake University of Medical and Health Sciences
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Nakamura Mitsuhiro
Faculty of Engineering, Kansai University
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