Spatio temporal Variation of the Density Distributions in Ar RF Plasmas Using the Monte Carlo Simulation/Legendre Polynomial Weighted Sampling Method
スポンサーリンク
概要
- 論文の詳細を見る
The demands on plasma process technology in recent years have driven the development of two-dimensional (2D) and even three-dimensional (3D) simulations. However, multidimensional simulations of capacitively coupled plasma sources are problematic. Full Monte Carlo or particle simulations where the kinetics is represented as a matter of course are the now a large undertaking when the chemistry is considered. Here the issue is the trade-off between time and accuracy. In this paper, we present a Monte Carlo simulation (MCS) of a parallel-plate capacitively coupled plasma to demonstrate the application of particle models that overcome these difficulties: time, accuracy and complexity. Inherent limitations with particle simulations by themselves are overcome by sampling spatial and kinetic information using Legendre polynomial weighted sampling (LPWS). In this paper, we present electron velocity distribution functions (EVDFs), ion velocity distribution functions (IVDFs) and density distribution functions for argon plasma in an RF-driven parallel-plate using LPWS and combine it with the null-collision method to reduce computation time. The results are benchmarked against well-known Ar plasma properties to validate this method.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-03-15
著者
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Suzuki Takuma
Division Of Mechanical Engineering System Hokkaido Institute Of Technology
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Kitamori Kazutaka
Division Of Mechanical System Engineering Hokkaido Institute Of Technology
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Maruyama Koichi
Division Of Mechanical System Engineering Hokkaido Institute Of Technology
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Horie Ikuya
Division of Mechanical Engineering System, Hokkaido Institute of Technology, 4-1-7-15, Maeda, Teine Ward, Sapporo 006-8585, Japan
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Horie Ikuya
Division of Mechanical System Engineering, Hokkaido Institute of Technology, 4-1-7-15, Maeda, Teine, Sapporo 006-8585, Japan
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Maruyama Koichi
Division of Mechanical System Engineering, Hokkaido Institute of Technology, 4-1-7-15, Maeda, Teine, Sapporo 006-8585, Japan
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Suzuki Takuma
Division of Mechanical System Engineering, Hokkaido Institute of Technology, 4-1-7-15, Maeda, Teine, Sapporo 006-8585, Japan
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Kitamori Kazutaka
Division of Mechanical Engineering System, Hokkaido Institute of Technology, 4-1-7-15, Maeda, Teine Ward, Sapporo 006-8585, Japan
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Kitamori Kazutaka
Division of Mechanical System Engineering, Hokkaido Institute of Technology, 4-1-7-15, Maeda, Teine, Sapporo 006-8585, Japan
関連論文
- Electron Transport in Nonorthogonal Crossed DC Electric and Magnetic Fields
- Parallel Simulations of Relaxation in Electron Transport in Crossed Electric and Magnetic Fields
- Spatio temporal Variation of the Density Distributions in Ar RF Plasmas Using the Monte Carlo Simulation/Legendre Polynomial Weighted Sampling Method