Electron Transport in Nonorthogonal Crossed DC Electric and Magnetic Fields
スポンサーリンク
概要
- 論文の詳細を見る
Transport and plasma chemistry in magnetized plasma sources for plasma processing are become increasingly important. Beyond the plasma shaping and confinement associated with magnetic fields in magnetically enhanced reactive ion etching (MERIE) tools, magnetized inductively coupled plasmas and conventional magnetrons, there are electron-kinetics-driven chemistry functions as well. It is difficult to capture these effects using conventional fluid or hybrid approaches, as it is not straightforward how to map transport and kinetic macroparameters onto common orthogonal grids. This paper addresses this issue by characterizing macroparameters (also known as swarm parameters) as a function of crossed electric and magnetic field crossing angle for Cl2 and SiH4. Scaling or mapping criteria (i.e., mapping of swarm parameters onto an orthogonal numerical grid) are described to be a function of the relative position of the energy threshold of collision processes and the mean electron energy. Using these criteria, the transport or kinetic parameters may be mapped either by angle cosines or by their components on an orthogonal grid. Significant exceptions to this occur for certain inelastic processes. When threshold energies coincide with the mean electron energy, it is not possible to determine simple mapping criteria independent of exact knowledge of how the parameters behave at a specific crossing angle.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-08-15
著者
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Suzuki Takuma
Division Of Mechanical Engineering System Hokkaido Institute Of Technology
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Suzuki Takuma
Division Of Mechanical System Engineering Hokkaido Institute Of Technology
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Horie Ikuya
Division of Mechanical System Engineering, Hokkaido Institute of Technology, 4-1-7-15 Maeda, Teine W
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Kitamori Kazutaka
Division of Mechanical System Engineering, Hokkaido Institute of Technology, 4-1-7-15 Maeda, Teine W
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Maruyama Koichi
Division of Mechanical System Engineering, Hokkaido Institute of Technology, 4-1-7-15 Maeda, Teine W
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Horie Ikuya
Division Of Mechanical System Engineering Hokkaido Institute Of Technology
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Kitamori Kazutaka
Division Of Mechanical System Engineering Hokkaido Institute Of Technology
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Maruyama Koichi
Division Of Mechanical System Engineering Hokkaido Institute Of Technology
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Horie Ikuya
Division of Mechanical Engineering System, Hokkaido Institute of Technology, 4-1-7-15, Maeda, Teine Ward, Sapporo 006-8585, Japan
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Kitamori Kazutaka
Division of Mechanical Engineering System, Hokkaido Institute of Technology, 4-1-7-15, Maeda, Teine Ward, Sapporo 006-8585, Japan
関連論文
- Electron Transport in Nonorthogonal Crossed DC Electric and Magnetic Fields
- Parallel Simulations of Relaxation in Electron Transport in Crossed Electric and Magnetic Fields
- Spatio temporal Variation of the Density Distributions in Ar RF Plasmas Using the Monte Carlo Simulation/Legendre Polynomial Weighted Sampling Method