Data Averaging Effect on Roughness Measurement using Phase-Shifting Interferometry for a Few-Ten-Angstrom and Sub-Angstrom Rough Surfaces

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概要

• 論文の詳細を見る

• The phase and intensity data averaging effect on roughness measurement using phase-shifting interferometry was investigated for a few-ten-Å and sub-Å rough surfaces. For a few-ten-Å rough surface, the roughness value did not depend on the data average. In contrast, the sub-Å rough surface determination was strongly influenced by the data average so that measurement error was significantly improved as the number of data averages increased. As an optimal data average condition that the measurement noise was minimized, 30 phase data and 20 intensity data averages were experimentally determined. Sub-Å roughness measurement under the optimal data average condition had high measurement accuracy of the absolute roughness and small measurement reproducibility error.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-07-15

著者

• Oh Moon-su

  Technology Research Center Agency For Defense Development

• Jo Min-sik

  Technology Research Center Agency For Defense Development

• Jo Min-Sik

  Technology Research Center, Agency for Defense Development, Yusong P. O. Box 35-5, Taejon 305-600, Korea

関連論文

• Data Averaging Effect on Roughness Measurement using Phase-Shifting Interferometry for a Few-Ten-Angstrom and Sub-Angstrom Rough Surfaces
• Performance Optimization of Phase-Shifting Interferometry Using Data Average on Wide Range Roughness Measurement
• Data Averaging Effect on Roughness Measurement using Phase-Shifting Interferometry for a Few-Ten-Angstrom and Sub-Angstrom Rough Surfaces

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