Data Averaging Effect on Roughness Measurement using Phase-Shifting Interferometry for a Few-Ten-Angstrom and Sub-Angstrom Rough Surfaces

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-07-15

著者

• Oh Moon-su

  Technology Research Center Agency For Defense Development

• JO Min-Sik

  Technology Research Center, Agency for Defense Development

• Jo M‐s

  Agency For Defense Dev. Taejon Kor

関連論文

• Data Averaging Effect on Roughness Measurement using Phase-Shifting Interferometry for a Few-Ten-Angstrom and Sub-Angstrom Rough Surfaces
• Performance Optimization of Phase-Shifting Interferometry Using Data Average on Wide Range Roughness Measurement
• Data Averaging Effect on Roughness Measurement using Phase-Shifting Interferometry for a Few-Ten-Angstrom and Sub-Angstrom Rough Surfaces

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