Photothermal Deflection Microscope Using Linear-Motor-Driven Pulse Stages and its Applications
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概要
- 論文の詳細を見る
A photothermal deflection microscope using linear-motor-driven slide stages for scanning was designed and fabricated. The photothermal microscope achieved high-resolution scanning (0.1 $\mu$m step), fast scanning (40 mm/s) and random access. It operates in a conventional operating software environment as a photoacoustic microscope and is capable of operating in an open-air environment. It was applied to the imaging of semiconductor microdevices such as integrated circuits. Resolution up to 8–12 $\mu$m was achieved.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2001-05-30
著者
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Miyamoto Katsuhiko
Department of Applied Physics and Informatics, Tohoku Gakuin University, 13-1 Chuo-1, Tagajyo 985-8537, Japan
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Miyamoto Katsuhiko
Department of Applied Physics, Tohoku Gakuin University, 13-1 Chuo-1, Tagajo, Miyagi 985-8537, Japan
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Hoshimiya Tsutomu
Department of Applied Physics and Informatics, Tohoku Gakuin University, 13-1 Chuo-1, Tagajyo 985-8537, Japan
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Hoshimiya Tsutomu
Department of Applied Physics, Tohoku Gakuin University, 13-1 Chuo-1, Tagajo, Miyagi 985-8537, Japan
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