An Improved Fiber-Bundle-Coupler Array for End-Point Detection Process

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概要

• 論文の詳細を見る

• We demonstrated a new-designed plastic-optical-fiber-bundle (POFB) coupler array for dynamic monitoring and end-point detection of the photoresist development process. A better optical collecting efficiency is achieved by using a normal illumination/detection scheme and a POFB coupler with larger cross section. Time-resolved dissolution rate can be obtained by synchronous calculation of the reflected optical interference data with deviation of less than 1.5%. Experiment on in-situ mapping of transient thickness variation of photoresist film during development by using two-dimensional POFB coupler array is also reported. The POFB-based coupler exhibits relatively low coupling and insertion loss at visible light wavelength as compared with the silica-fiber-based one. The system is compatible for real-time/multi-port measurements of micro-lithographic and dielectric etching processes.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-02-15

著者

• Lin Gong-ru

  Institute Of Electro-optic Engineering Naional Chiao Tung University

• Lin Gong-Ru

  Institute of Electro-Optic Engineering, Tatung University, 40 Chung Shan North Rd, Sect. 3, Taipei 10451, Taiwan, R.O.C.

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