Sulfonamide-Phenolic Resin Negative Resist for KrF Excimer Laser Lithography
スポンサーリンク
概要
- 論文の詳細を見る
It was found that aromatic sulfonamides offer a novel category of photosensitive compounds for negative resists. A photosensitive layer consisting of $m$-cresol novolak resin and an aromatic sulfonamide such as $p$-(tolyl sulfonyl)-aniline, benzene sulfonyl aniline, $p$-toluene sulfonamide or 4,4$'$-methylene-di($p$-tolyl sulfonyl)-aniline is insolubilized in an aqueous base by exposure to deep-UV lights involving KrF excimer laser light. The negative resists exhibited the sensitivities (D$_{g}^{0.5}$) from 25 mJ/cm2 to 80 mJ/cm2 depending on the structure of sulfonamide. By exposure with a KrF excimer laser stepper 0.8 and 0.35 $\mu$m line patterns were transferred. The mechanism of the photoinsolubilization is also discussed.
- 1989-10-20
著者
-
Kitamura Jun
Deparment Of Omage Science And Technology Faculty Of Engineering
-
Yamaoka Tsuguo
Deparment Of Omage Science And Technology Faculty Of Engineering
-
NISHIKI Masashi
Deparment of Omage Science and Technology Faculty of Engineering
-
Jin Shun
Department of Image Science and Technology Faculty of Engineering, Chiba University, 1-33, Yayoi-cho, Chiba-shi, Chiba, 260 Japan
-
Kitamura Jun
Department of Image Science and Technology Faculty of Engineering, Chiba University, 1-33, Yayoi-cho, Chiba-shi, Chiba, 260 Japan
-
Yamaoka Tsuguo
Department of Image Science and Technology Faculty of Engineering, Chiba University, 1-33, Yayoi-cho, Chiba-shi, Chiba, 260 Japan
関連論文
- The incidence and prognosis of the patients with aortic mobile plaques detected by transesophageal echocardiography
- PE-117 Evaluation of Left Internal Thoracic Artery Graft Stenosis only by Peak Diastolic Velocity of Transthoracic Echocardiography(Echo/Doppler 4 (I) : PE20)(Poster Session (English))
- OJ-093 Noninvasive Diagnosis of the Left Internal Thoracic Artery Graft Stenosis at the Anastomotic Site by Transthoracic Doppler Echocardiography(Echo/Doppler 1 (I) : OJ11)(Oral Presentation (Japanese))
- Late Regression of Left Internal Thoracic Artery (LITA) Graft Stenosis at the Site of Anastomosis without Intervention Therapy
- Impact of Aortic Plaque Morphology on Survival Rate and Subsequent Embolic Event Rate : Comparison between Mobile Plaque and Non-Mobile Diffuse Plaque
- Laser-Flash Photolysis in IIigh-Speed Photopolymer Coating Layers Containing Carbonylbiscoumarin Dyes and 2,2'-Bis(2-chlorophenyl)-4,4',5,5' -tetraphenyl- 1 ,1' -bi-1H-imidazole
- Laser Flash Photolysis in High-Speed Photopolymer Coating Layers: Effects of Incorporating Dimethyl Phthalate as a Plasticizer into Coating Formulation
- Laser Flash Photolysis in High-Speed Photopolymer Coating Laysrs
- Sulfonamide-Phenolic Resin Negative Resist for KrF Excimer Laser Lithography : Resist Material and Process
- Diphenyliodonium Salts with Pyranine Conk as an Environment-friendly Photo-acid Generator and Their Applications to Chemically Amplified Resists
- Diphenyliodonium Salts with Environment-friendly Dye for a Photo-acid Generator in Chemically Amplified Resist
- Sulfonamide-Phenolic Resin Negative Resist for KrF Excimer Laser Lithography
- An Unusual Spliced Variant of DELLA Protein, a Negative Regulator of Gibberellin Signaling, in Lettuce
- An Unusual Spliced Variant of DELLA Protein, a Negative Regulator of Gibberellin Signaling, in Lettuce
- Photoalignment Films of Polyesters with Photoreactive Main Chain
- Excitation wavelength dependence of phosphorescence and hydrogen-bonding formation of thioxanthone and 2,4-diisopentylthioxanthone.
- Formation of Acyclic cis-Azobenzene without Light.
- The Photo-decomposition of 1-Azidopyrene in the Benzene Solution