Diphenyliodonium Salts with Pyranine Conk as an Environment-friendly Photo-acid Generator and Their Applications to Chemically Amplified Resists

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概要

• 論文の詳細を見る
• 2005-08-15

著者

• TAKAHARA shigeru

  Department of Image Science, Facutly of Engineering, Chiba University

• Yamaoka T

  Department Of Information And Image Sciences Faculty Of Engineering Chiba University

• Yamaoka Tsuguo

  Deparment Of Omage Science And Technology Faculty Of Engineering

• Miyagawa N

  Department Of Information And Image Sciences Faculty Of Engineering Chiba University

• Miyagawa Nobukazu

  Department Of Chemistry Faculty Of Science Chiba University

• Takahara S

  Department Of Information And Image Sciences Faculty Of Engineering Chiba University

• TARUMOTO Naohiro

  Hodogaya Chemical Co., Ltd.

• Tarumoto N

  Hodogaya Chemical Co. Ltd.

• Takahara Shigeru

  Department of Chemistry, University of Tsukuba

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