Diphenyliodonium Salts with Pyranine Conk as an Environment-friendly Photo-acid Generator and Their Applications to Chemically Amplified Resists
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概要
- 論文の詳細を見る
- 2005-08-15
著者
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TAKAHARA shigeru
Department of Image Science, Facutly of Engineering, Chiba University
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Yamaoka T
Department Of Information And Image Sciences Faculty Of Engineering Chiba University
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Yamaoka Tsuguo
Deparment Of Omage Science And Technology Faculty Of Engineering
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Miyagawa N
Department Of Information And Image Sciences Faculty Of Engineering Chiba University
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Miyagawa Nobukazu
Department Of Chemistry Faculty Of Science Chiba University
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Takahara S
Department Of Information And Image Sciences Faculty Of Engineering Chiba University
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TARUMOTO Naohiro
Hodogaya Chemical Co., Ltd.
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Tarumoto N
Hodogaya Chemical Co. Ltd.
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Takahara Shigeru
Department of Chemistry, University of Tsukuba
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