Rapid and Localized Synthesis of Single-Walled Carbon Nanotubes on Flat Surface by Laser-Assisted Chemical Vapor Deposition
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概要
- 論文の詳細を見る
The synthesis of single-walled carbon nanotubes (SWNTs) at a controlled position on a flat surface was demonstrated by laser-assisted chemical vapor deposition (CVD). The developed multilayer substrate including an energy-confining layer (ECL) enabled the efficient heating of catalysts on the surface, resulting in the rapid and localized syntheses of SWNTs. Using a Nd:YAG laser as a heat source, we achieved the rapid synthesis with laser irradiation for 1 s and the localized synthesis in an area of approximately 1 μm diameter. In addition, the scanning of the laser irradiation spot at a rate of 1 μm/s enabled the line-patterned synthesis of SWNTs at a linewidth of 2 μm. The resulting synthesis of SWNTs on a flat surface by laser-assisted CVD will lead to the easy and controllable fabrication of SWNT-based nanodevices.
- Japan Society of Applied Physicsの論文
- 2007-04-25
著者
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Nakao Masayuki
Department Of Cardiology Kanagawa Cardiovascular And Respiratry Center
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KASUYA Keigo
Department of Engineering Synthesis, The University of Tokyo
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Morii Hiroshi
Department Of Molecular Chemistry Faculty Of Engineering Hokkaido University
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Nagato Keisuke
Department Of Engineering Synthesis Graduate School Of Engineering The University Of Tokyo
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Jin Yusuke
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Ooi Takeshi
Komatsu Ltd., 1200 Manda, Hiratsuka, Kanagawa 254-8567, Japan
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Nagato Keisuke
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Nakao Masayuki
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Morii Hiroshi
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Kasuya Keigo
Department of Engineering Synthesis, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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