Polycrystalline to Single-Crystalline InN Grown on Si(111) Substrates by Plasma-Assisted Molecular-Beam Epitaxy
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概要
- 論文の詳細を見る
The structural evolution of InN from microsized grains to nanocolumns, and to a two-dimensional epifilm grown on Si(111) substrates was realized by plasma-assisted molecular-beam epitaxy. Grainy InN was grown at a higher substrate temperature, and a higher NBEP/InBEP ratio, and on a low-temperature InN buffer layer. A high-quality InN epifilm was grown at a lower substrate temperature, and a lower NBEP/InBEP ratio, and on a high-temperature AlN buffer layer with a room-temperature Hall mobility and a carrier concentration of 860 cm2/(V$\cdot$s) and $8.9\times 10^{18}$ cm-3, respectively. Photoluminescence spectroscopy showed a unique peak in the infrared region indicating that the energy gap of the InN is in the range of 0.64–0.66 eV.
- Japan Society of Applied Physicsの論文
- 2005-08-10
著者
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Chen Min
Department Of Biochemistry And Molecular Biology Third Military Medical University
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Hsiao Ching-lien
Department Of Physics Chemistry And Biology (ifm) Linkoping University
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Fan Ni-Wan
Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan 80424, Republic of China
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Wang Kwang-Ru
Department of Materials Science and Engineering, National Tsing-Hua University, Hsinchu, Taiwan 30013, Republic of China
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Tu Li-Wei
Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan, R.O.C.
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Jiang Zhi-Wei
Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan 80424, Republic of China
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Tu Yen-Jie
Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan 80424, Republic of China
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Hsiao Ching-Lien
Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan 80424, Republic of China
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Chen Min
Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan 80424, Republic of China
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