Fabrication of Waveguide-Type Add/Drop Grating Filter by Radio-Frequency Magnetron Sputtering to Insert GeO2–SiO2 Cladding Layers
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概要
- 論文の詳細を見る
We developed a waveguide-type add/drop grating filter that has GeO2–SiO2 cladding layers inserted into the conventional waveguide structure by rf-magnetron sputtering, to suppress cladding mode coupling loss. Optimizing the fabrication conditions for the GeO2–SiO2 core and cladding layers enabled us to fabricate a waveguide-type add/drop grating with low loss and without voids in the narrow core-to-core gaps. Our results showed that this waveguide, having high quality GeO2–SiO2 films and a unique structure, had a propagation loss of 0.18 dB/cm and suppressed the cladding mode coupling loss around 1550 nm to approximately 0.3 dB, compared with the 5.0 dB loss of conventional waveguides.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-03-15
著者
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OKANO Hiroaki
Optoelectoronic System Laboratory, Hitachi Cable, Ltd.
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UETSUKA Hisato
Optoelectoronic System Laboratory, Hitachi Cable, Ltd.
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Sato Shinobu
Optoelectronic System Laboratory Hitachi Cable Ltd.
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Ohkubo Hiroyuki
Optoelectronic System Laboratory Hitachi Cable Ltd.
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Hongo Akihito
Optoelectronic System Laboratory Hitachi Cable Ltd.
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Kashimura Seiichi
Optoelectronic System Laboratory Hitachi Cable Ltd.
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Sato Shinobu
Optoelectronic System Laboratory, Hitachi Cable, Ltd., 5-1-1 Hitaka-cho, Hitachi, Ibaraki 319-1414, Japan
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