Nanoelectrode Lithography
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概要
- 論文の詳細を見る
A new lithographic method is proposed and demonstrated that has the potential to make nano-fabrication a more widely available technique. Nanoelectrode lithography works by transferring the pattern on a nanoelectrode to a target via an electrochemical reaction. This technique may provide a better throughput and flexibility than conventional lithographic techniques. This describes and proves the concept of nanoelectrode lithography.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2003-02-01
著者
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YOKOO Atsushi
NTT Basic Research Laboratories
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Yokoo Atsushi
NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi 243-0198, Japan
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