Laser Scan Lithography onto Fine Pipes and Wires with Sub-100-.MU.m Diameters

概要

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Laser scan lithography was applied to patterning onto surfaces of fine pipes and wires with sub-100-μm diameters. Such patterning is useful for developing micro-coil springs. A prototype exposure system has already been developed, and it has been demonstrated that tiny micro-coils are successfully fabricated. However, patterning reproducibility and coil-width accuracy must be ensured to move to the next step for applying the micro-coils to practical products. Considering these backgrounds, helical patterning characteristics are investigated in detail. At first, 10-μm helical space patterns were delineated onto copper pipe specimens with a diameter of 100 μm to ensure the practical minimum pattern width. As a result, the minute patterns were stably formed with deviations of within 0.7 μm. Next, helical patterns with a width around 50 μm were delineated onto 80-μm diameter stainless-steel wires to reply the immediate requirements. It was certificated that both patterning reproducibility among the specimens and the pattern width homogeneity in every specimen were very good and sufficient for the practical use.
The Society of Photopolymer Science and Technology (SPST)の論文