Conventional Measurement Method of Film Resistance of Plasma-Polymerized Thin Films Using a High-Resistance Meter
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概要
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We developed conventional measurement method of film resistance of plasma-polymerized (pp-) films from styrene and allylalcohol as a monomer coated with stainless plates using a high-resistance meter. This determination method is estimated for the film resistance range from 10<SUP>5</SUP> to 10<SUP>12</SUP> Ω/cm. We found correlation between film thickness from 150 to 500 nm and the resistance value of 10<SUP>5</SUP> to 10<SUP>12</SUP> Ω /cm for pp-allylalcohol film.
- The Society of Photopolymer Science and Technology (SPST)の論文
The Society of Photopolymer Science and Technology (SPST) | 論文
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