High Temporal Resolution Measurements of Shrinkage Characteristics of UV Nanoimprint Rresin
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概要
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We investigated the shrinkage characteristics of UV nanoimprint resin during UV exposure using a high temporal resolution measurement system. The time lag of the onset of the resin shrinkage in response to the UV exposure was verified. For an UV-curable resin (Toyogosei PAK-01) investigated in this study, the lag time was determined to be around 30 ms. We found that the environment gas (air and pentafluoropropane gas) had no effect on the time lag. The effects of multiple UV exposures on polymerization were investigated from the shrinkage variation induced with the polymerization. By comparing the shrinkages evaluated in the environments of the air and pentafluoropropane gas, the same shrinkage characteristic was verified in the two environments. The shrinkage variation was in good agreement with the polymerization rate suggested as the first-order reaction kinetics of polymerization.
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The Society of Photopolymer Science and Technology (SPST) | 論文
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