Design and Development of Alignment Mechanism for Micro-Parts by Using Vibration Modes

概要

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This paper deals with an alignment device for micro parts, which have a size in the order of 100 micrometers, by using a board stage that is vibrated in the natural frequencies of the various vibration modes. Part alignment is important for manufacturing processes, such as the assembling of small parts and the inspection of parts. Since it is difficult to grip and handle micro objects, a simple and reliable method is required. In this paper, the design concept and guidelines to realize such a device are presented. In addition to the theoretical representation, an example stage was designed for the alignment of the micro parts. It was also analyzed by Finite Element Method (FEM) simulations. Also, the designed vibration stage was fabricated using a stainless steel thin plate. Experimental results showed that the actual vibration is similar to both the theoretical results and the simulation results. As an example of the alignment of the micro parts, some micro-seize electronics parts were tested.