Growth model of Reversed Taper during Early Stage of D.C. Etching on Aluminum Oriented to (100)

スポンサーリンク

概要

• 論文の詳細を見る

• The tunnel growth mechanism of aluminum foil was studied in order to control the etching morphology. The growth of tunnels with a reversed taper followed by the tapered tunnel growth was observed only in acid solution. We proposed a model of the self-corrosion of aluminum for the reversed taper growth, and verified it by comparison of the current efficiency with the measured value made by ICP-ES to the simulation obtained from the results of the reversely tapered tunnel structure. From results of the early tunnel growth with a reversed taper, we discussed the relation between the limit length of the tunnel and width of the tunnel. It was expected that a uniform length of the tunnels should be obtained by controlling the width at the tunnel mouth to the same size.

• 公益社団法人 電気化学会の論文

著者

• MAKINO Takeshi

  Research Center, Nippon Chemi-Con Corporation

• Idemoto Yasushi

  Department Of Industrial Chemistry Faculty Of Science And Technology Science University Of Tokyo

• Koura Nobuyuki

  Department Of Industrial Chemistry Faculty Of Science And Technology Science University Of Tokyo

• Yamasaki Takashi

  Department Of Applied Chemistry Graduate School Of Engineering Osaka Prefecture University

• UI Koichi

  Department of Industrial and Engineering Chemistry, Faculty of Science and Technology, Tokyo University of Science

• UI Koichi

  Department of Frontier Materials and Function Engineering, Graduate School of Engineering, Iwate University

• FURUKAWA Masakazu

  Research Center, Surface Finishing Laboratory, Nippon Chemi-Con Corporation

• UCHI Hidenori

  Research Center, Surface Finishing Laboratory, Nippon Chemi-Con Corporation

• KOURA Nobuyuki

  Department of Industrial and Engineering Chemistry, Faculty of Science and Technology, Tokyo University of Science

• IDEMOTO Yasushi

  Department of Industrial and Engineering Chemistry, Faculty of Science and Technology, Tokyo University of Science

• MAKINO Takeshi

  Research Center, Surface Finishing Laboratory, Nippon Chemi-Con Corporation

関連論文

• Preparation and estimation of Ba0.9Sr0.1TiO3 dielectric films by EPD method with fine powder slurry
• Formation of Porous Aluminum Films with Isolated Columnar Structure Using Physical Vapor Deposition for Medium-Voltage and High-voltage Capacitors
• Preparation of Crystalline TiO_2 Thin Film Photocatalysts on Polycarbonate Substrates by a RF-magnetron Sputtering Deposition Method
• Nutritional Enrichment of Larval Fish Feed with Thraustochytrid Producing Polyunsaturated Fatty Acids and Xanthophylls(MICROBIAL PHYSIOLOGY AND BIOTECHNOLOGY)
• Utilization of Shochu Distillery Wastewater for Production of Polyunsaturated Fatty Acids and Xanthophylls Using Thraustochytrid(MICROBIAL PHYSIOLOGY AND BIOTECHNOLOGY)
• Preparation of Various Oxide Films by an Electrophoretic Deposition Method : A Study of the Mechanism
• Preparation of YBa_2Cu_3O_ Superconductor Coating on Austenitic Steel by Electrophoretic Deposition Method : Study on Buffering Layers
• Crystal Structure of Fast Lithium-ion-conducting Cubic Li_7La_3Zr_2O_
• Change in Crystal Structure of LiNi_Co_Cu_O_2 Cathode during Charge of Coin Cell Observed by Ex Situ Time-of-flight Neutron Diffraction
• Li and Li-Al Negative Electrode Characteristics for the Lithium Secondary Battery with a Nonflammable SOCl2,Li Added,LiCl Saturated AlCl3-EMIC Molten Salt Electrolyte (特集 New Trends in Molten Salt Chemistry and Electrochemistry)
• Positive Electrode Active Material for a Nonflammable Rocking Chair Type Lithium Secondary Battery with an Ambient Temperature Molten Salt Electrolyte
• Recrystallization and Microstructure in Electrophoretically Deposited Ferroelectric BaTiO_3 Films under CO_2-Laser Irradiation ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
• Fabrication of Ferroelectric BaTiO_3 Films by Electrophoretic Deposition
• Defect Thermodynamics of (La_Sr_x)_2CuO_ Superconducting Oxide
• Preparation of TB(S)CCO Superconductor Coating by Electrophoretic Deposition Method
• Defect Thermodynamics of Nd_Ce_xCuO_
• Melting Point of Superconducting Oxides as a Function of Oxygen Partial Pressure
• Fabrication and Optical Properties of Two-Dimensional Ordered Arrays of Silica Microspheres
• Hyperresponsiveness of Cardiac Muscles to Histamine in Reserpine-Treated Guinea Pigs.
• 炭素源がリチウム過剰Li.TiO炭素複合体の表面形態と電気化学的特性に及ぼす影響
• Li+ Ion-exchanged Hollandite-type MnO2 in Molten Salt at Several Temperatures and Electrochemical Properties for Lithium Battery Electrodes
• Evaluation and Reliability Improvement Investigation of Electrical Characteristics of Ba0.9Sr0.1TiO3 Dielectric Films Prepared by Electrophoretic Deposition Method
• Study of Mechanism of Mixed Conduction Due to Electrons and Oxygen Ions in (La0.75Sr0.25)MnO3.00 and (Ba0.5Sr0.5)(Co0.8Fe0.2)O2.33 through Rietveld Refinement and MEM Analysis
• Crystal Structure and Ferroelectric Properties of Si Added SrBi2Ta2O9
• Oxide-Ion Conduction, Average and Local Structures of LaSrGa1−xMgxO4−δ with Layered Perovskite Structure
• Growth model of Reversed Taper during Early Stage of D.C. Etching on Aluminum Oriented to (100)
• Oxide-Ion Conduction Property of La1+xSr1-xGa3O7+δ Synthesized by Solution Method
• Effects of Melatonin on Blood Pressure, Heart Rate and Activity in Conscious, Freely Moving Stroke-prone Spontaneously Hypertensive Rats as determined by a Radiotelemetry System

もっと見る 閉じる

スポンサーリンク