Preparation and estimation of Ba0.9Sr0.1TiO3 dielectric films by EPD method with fine powder slurry
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概要
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Electrophoretic deposition (EPD) was used to deposit dielectric thin films. A fine Ba0.9Sr0.1TiO3 powder slurry was suspended in acetone and iodine was added to enhance the film quality by increasing the zeta potential. The highest zeta potential was obtained by adding 0.10 g/L of I2, which allowed a 0.54-µm-thick film to be deposited on a Ni foil in 10 s at 20 V. After annealing the film at 800°C for 30 min in a N2 atmosphere, the capacitance density of the film was 73.9 nF/cm2 and its loss tangent was 0.021, while the residual leakage current density at 10 V was as low as 0.3 µA/cm2. No frequency dependence was observed in the range 1 kHz to 10 MHz.
著者
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Abe Naohiko
Department of Pure and Applied Chemistry, Faculty of Science and Technology, Tokyo University of Sci
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Hoshino Masahiko
Department of Pure and Applied Chemistry, Faculty of Science and Technology, Tokyo University of Sci
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Kitamura Naoto
Department of Pure and Applied Chemistry, Faculty of Science and Technology, Tokyo University of Sci
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ICHIRYU Akira
Mitsui Mining and Smelting Co., Ltd.
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IDEMOTO Yasushi
Department of Pure and Applied Chemistry, Faculty of Science and Technology, Tokyo University of Sci
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Kitamura Naoto
Department Of Internal Medicine Keio University School Of Medicine
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Idemoto Yasushi
Department Of Industrial Chemistry Faculty Of Science And Technology Science University Of Tokyo
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Kitamura Naoto
Department Of Pure And Applied Chemistry Faculty Of Science And Technology Tokyo University Of Scien
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HOSHINO Masahiko
Department of Pure and Applied Chemistry, Faculty of Science and Technology, Tokyo University of Science
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ABE Naohiko
Department of Pure and Applied Chemistry, Faculty of Science and Technology, Tokyo University of Science
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IDEMOTO Yasushi
Department of Industrial and Engineering Chemistry, Faculty of Science and Technology, Tokyo University of Science
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