Micro- and Nano-Technologies Based on Anodizing of Aluminum—Combination of Laser Irradiation with Electrochemical Process

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In this review, recent development in micro- and nano-technologies based on anodizing of aluminum is introduced and several applications of anodic oxide films in the fabrication of micro-devices are also described. In the application work, aluminum covered with anodic oxide films is irradiated with a pulsed Nd-YAG laser to remove the oxide film locally and then metal, acrylic acid resin, and polypyrrole are deposited at the film-removed area electrochemically. Grooves, chambers, and through-holes on aluminum are also fabricated by the laser irradiation technique. By combining anodizing with the laser irradiation techniques and electrochemical treatments, novel fabrication processes are developed for printed circuit boards, plastic injection molds, electrochemical reactors, and freestanding structures, 3D manipulators, and also micro-printing rolls.
公益社団法人電気化学会の論文