Fabrication of Cu Micro-rods with Co-axial Dual Capillary Solution Flow Type Droplet Cell and Electrodeposition with the Cell

概要

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A new method for mask-less fabrication of metal micro-rods is described. The developed solution flow type droplet cell micro fabrication technique was applied to form Cu micro-rods. The use of an inner capillary tube as a mold during electrodeposition, makes it possible to form Cu micro-rods of about 15 mm length and about 100 µm diameter. The length is controlled by the deposition time. From X-ray analysis and surface observations, the formed Cu micro-rod is polycrystalline and the crystals are very fine. The cross section of the micro-rod was almost circular and the diameter was almost the same throughout its length. This technique also makes it possible to form straight metal structures as well as branched and layered micro-rods. This layered micro-rod fabrication technique can be applied to form resistance controlled micro wires.
公益社団法人電気化学会の論文