Surface Form Measurement and Analysis of a Cylindrical Workpiece with Microstructures
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概要
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A measurement system is presented for the surface form measurement of a cylindrical workpiece with periodic microstructures generated on the outer surface of the workpiece. The main components of the measurement system are a spindle to rotate the workpiece, and an air-bearing displacement sensor with a diamond micro stylus to detect the surface form of the workpiece. The surface form of the micro-structured workpiece was measured in different rotation speeds and the relationship between the measurement repeatability and the rotation speed was investigated. The Fourier transform analysis and the wavelet transform analysis were employed to analyze the measurement results in the time-frequency domain for the identification of the error sources with specific frequency characteristics.
著者
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ITO So
Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University
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XU Bin
Nano-Metrology and Control Laboratory / Research Center for Precision Nanosystems, Department of Nanomechanics, School of Engineering, Tohoku University
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SHIMIZU Yuki
Nano-Metrology and Control Laboratory / Research Center for Precision Nanosystems, Department of Nanomechanics, School of Engineering, Tohoku University
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GAO Wei
Nano-Metrology and Control Laboratory / Research Center for Precision Nanosystems, Department of Nanomechanics, School of Engineering, Tohoku University
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TAKEISHI Toshiki
Nano-Metrology and Control Laboratory / Research Center for Precision Nanosystems, Department of Nanomechanics, School of Engineering, Tohoku University
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ITO So
Nano-Metrology and Control Laboratory / Research Center for Precision Nanosystems, Department of Nanomechanics, School of Engineering, Tohoku University
関連論文
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