D29 Parallelism Measurement of the slide axis with respect to the spindle axis of a diamond turning machine(Nano/micro measurement and intelligent instruments)

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概要

• 論文の詳細を見る

• To measure the parallelism error between the Z-slide axis and the spindle axis of the ultra precision diamond turning machine which has a T-base design with a spindle, an X-slide and a Z-slide, the rotating reversal method is carried out. Two capacitance probes are employed for the measurement of the cylinder workpiece(for rotating) which was installed on the spindle. The straightness error of the Z-slide of the ultra-precision diamond turning machine was measured to be about 100 nm and parallelism error was evaluated to be approximately 0.84 arc-second of the Z-slide by the rotating reversal method over a movement range of 126 mm

• 一般社団法人日本機械学会の論文
• 2009-12-01

著者

• Gao Wei

  Nano-metrology And Control Laboratory Department Of Nanomechanics Tohoku University

• LEE JungChul

  Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University

• NOH YoungJin

  Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University

• ARAI Yoshikazu

  Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University

• HWANG JooHo

  Korea Institute of Machinery and Materials

• PARK ChunHong

  Korea Institute of Machinery and Materials

• Arai Yoshikazu

  Nano-metrology And Control Laboratory Department Of Nanomechanics Tohoku University

• Lee Jungchul

  Nano-metrology And Control Laboratory Department Of Nanomechanics Tohoku University

• Noh Youngjin

  Nano-metrology And Control Laboratory Department Of Nanomechanics Tohoku University

• GAO Wei

  Nano-Metrology and Control Laboratory / Research Center for Precision Nanosystems, Department of Nanomechanics, School of Engineering, Tohoku University

関連論文

• D33 Profile Measurement of Micro-structured Surfaces by Using SPMs(Nano/micro measurement and intelligent instruments)
• D29 Parallelism Measurement of the slide axis with respect to the spindle axis of a diamond turning machine(Nano/micro measurement and intelligent instruments)
• Surface Form Measurement and Analysis of a Cylindrical Workpiece with Microstructures
• Cutting Edge Height Measurement of a Rotary Cutting Tool by a Laser Displacement Sensor

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