D33 Profile Measurement of Micro-structured Surfaces by Using SPMs(Nano/micro measurement and intelligent instruments)
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概要
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In this paper, to realize rapid measurement for micro-structured surfaces, forces and currents are adopted as feedback signals for scanning probe microscopes (SPMs). These two kinds of signals are examined with a piezoelectric actuator. The nonlinearities of the actuator are compensated for with a resolution of 1 nm by a linear encoder. By using this measurement system, experiments of tracking the Z-directional displacement of a PZT stage are done with both the scanning force microscopy (SFM) and the scanning current microscopy (SCM). The constructed SCM shows better results than the SFM in terms of stability and sensitivity.
- 2009-12-01
著者
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Gao Wei
Nano-metrology And Control Laboratory Department Of Nanomechanics Tohoku University
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ARAI Yoshikazu
Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University
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Arai Yoshikazu
Nano-metrology And Control Laboratory Department Of Nanomechanics Tohoku University
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GOTO Shigeaki
Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University
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Asai Takemi
Nano-Metrology and Control Laboratory, Department of Nanomechanics, Tohoku University
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Asai Takemi
Nano-metrology And Control Laboratory Department Of Nanomechanics Tohoku University
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Goto Shigeaki
Nano-metrology And Control Laboratory Department Of Nanomechanics Tohoku University
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GAO Wei
Nano-Metrology and Control Laboratory / Research Center for Precision Nanosystems, Department of Nanomechanics, School of Engineering, Tohoku University
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