Advanced Fabrication Method of Planar Components for Plasma Diagnostics
スポンサーリンク
概要
- 論文の詳細を見る
As the importance of plasma imaging diagnostics increases, the fabrication of high performance millimeterwave planar components becomes essential. This paper describes the development of high performance millimeter-wave planar components such as antennas and filters using a low-loss fluorine substrate. The problems to be solved are the low degree of adhesion between copper foil and the fluorine substrate and the shape of the antenna pattern. In order to solve the problems, surface treatment of fluorine films and a fabrication method using Electro Fine Forming (EF2) are utilized.
著者
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Domier Calvin
Department Of Applied Science University Of California At Davis
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Mase Atsushi
Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Ito Naoki
Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Tamada Masao
Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-machi, Takasaki, Gunma 370-1292, Japan
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Seko Noriaki
Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, 1233 Watanuki-machi, Takasaki, Gunma 370-1292, Japan
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Kogi Yuichiro
Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Sakata Eiji
Kyushu Hitachi Maxell, Ltd., 4680 Ikata, Fukuchi-machi, Tagawa-gun, Fukuoka 822-1296, Japan
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YANG Lu
Department of Electrical and Computer Engineering, University of California at Davis, Davis, California 95616 USA
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YANG Lu
Department of Electrical and Computer Engineering, UC Davis, USA
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SHEN Zuowei
Department of Electrical and Computer Engineering, University of California at Davis, Davis, California 95616 USA
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LUHMANN Jr.
Department of Electrical and Computer Engineering, University of California at Davis, Davis, California 95616 USA
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LUHMANN Jr.
Department of Electrical and Computer Engineering, UC Davis, USA
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TAMADA Masao
Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, Takasaki, Gunma 370-1292, Japan
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DOMIER Calvin
Department of Electrical and Computer Engineering, University of California at Davis, Davis, California 95616 USA
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KOGI Yuichiro
Art, Science and Technology Center for Cooperative Research, Kyushu University
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SEKO Noriaki
Takasaki Advanced Radiation Research Institute, Japan Atomic Energy Agency, Takasaki, Gunma 370-1292, Japan
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MASE Atsushi
Art, Science and Technology Center for Cooperative Research, Kyushu University
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SHEN Zuowei
Department of Electrical and Computer Engineering, UC Davis, USA
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SAKATA Eiji
Kyushu Hitachi Maxell, Ltd, Tagawa-gun, Fukuoka 822-1296, Japan
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