New Advanced Fabrication Technique for Millimeter-Wave Planar Components based on Fluororesin Substrates using Graft Polymerization
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概要
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As the importance of advanced millimeter-wave diagnostics increases, a reliable and accurate fabrication technique for high-performance devices and relevant components is essential. We describe a new improved fabrication technique for millimeter-wave planar components, such as antennas using low-loss fluororesin substrates. A fragile adhesion between the copper foil and fluororesin substrate and the accuracy of the device pattern using conventional fabrication techniques have been prime suspects in the failure of the devices. In order to solve these problems, surface treatment of fluororesin films and a fabrication method using electro-fine-forming (EF2) are proposed. The peel adhesion strength between the metal and fluororesin films and the value of the dielectric constant of the fluororesin films before and after grafting are reported. A prototype antenna using conventional fluororesin substrates and grafted-poly(tetrafluoroethylene) (PTFE) films produced using the EF2 fabrication technique are also introduced.
- 2008-06-25
著者
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Mase Atsushi
Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Ito Naoki
Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Seko Noriaki
Quantum Beam Science Directorate, Japan Atomic Energy Agency, Takasaki, Gunma 370-1292, Japan
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Tamada Masao
Quantum Beam Science Directorate, Japan Atomic Energy Agency, Takasaki, Gunma 370-1292, Japan
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Sakata Eiji
Kyushu Hitachi Maxell, Ltd., Fukuchi, Fukuoka 822-1296, Japan
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Kogi Yuichiro
Art, Science, and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Kogi Yuichiro
Art, Science and Technology Center for Cooperative Research, Kyushu University, 6-1 Kasuga-Koen, Kasuga, Fukuoka 816-8580, Japan
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Sakata Eiji
Kyushu Hitachi Maxell, Ltd., 4680 Ikata, Fukuchi-machi, Tagawa-gun, Fukuoka 822-1296, Japan
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