The depth profiling of glass surfaces by mass spectrometry using neutral-particle bombardment.

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概要

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• Glass surfaces are bombarded by energetic neutral argon atoms or oxygen molecules, and the resulting sputtered ions are mass-analyzed. This technique has a higher depth resolution than conventional secondary-ion mass spectrometry. Quantitative depth-concentration profiles of sodium and potassium in the top layer of the surface (within several tens of nanometers of the surface) of Pyrex glass are obtained by the proposed technique.

• 公益社団法人 日本化学会の論文

著者

• Mizuike Atsushi

  Faculty Of Engineering Nagoya University

• Iino Akira

  Faculty of Engineering, Nagoya University

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