二成分速度分布函数をもつイオン流の発生

概要

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In this note is reported the results of our experiment for investigating a new type source of ion stream composed of two components in energy distribution. For this purpose a diffusion-type plasma source is used, which is formed with two arrays of oxide-coated cathode rods and five sheets of metalic mesh grids, The energy distribution of ion stream is observed with an electrostatic energy analyzer, whose resolution is 4%.<BR>In the present experiment ion streams of argon, helium, nitrogen and their mixtures are obtained, the energy of which ranges from 50 to 500, eV. The energies of two components of ion stream are determined by the voltages externally applied to two pairs of grids, and their relative intensities can be controlled by adjusting the temperatures of the two arrays of cathode rods and/or the potential of the intermediate grid.
社団法人プラズマ・核融合学会の論文