反応性イオンプレーティングによる積層皮膜の形成とその評価

概要

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It is well known that TiN and TiC films have been used practically as coatings for improving the properties of materials. In this study, a reactive ion plating technique was used to develope new films that combine the advantages of both films. Single-layer films of TiN or TiC, double-layer films of TiN/TiC and triple-layer films of TiN/Ti (C, N)/TiC were deposited, and their wear resistance and adhesion to substrates were evaluated by wear tests and scratch test.The wear test showed that wear resistance was influenced by the top layer in the case of the double-layer films, but by the intermediate layer in the case of the triple-layer films. The results of scratch tests indicated that the adhesion of TiC films to the substrate was strengthened by depositing a Ti (C, N) film as an intermediate layer.
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