非線形性を考慮した4点支持吸引形磁気浮上制御

概要

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In the field of semiconductor products such as VLSI, there arise needs for ultra clean environments in microscopic processing. One of factors of polusion is in production equipments. That is, the polusion is caused by the rubber parts in the equipments. One of techniques of solutions for this problem is to use a magnetic levitation system for noncontact transfer. In this paper, a magnetic levitaion control by 4 points attraction is presented. The problem is a nonlinearity at magnetic circuits with respect to the magnetic force especially when relatively nallow gap suspentions between magnets and the levitated vehicle is considered. In fact, the suspention gap of the experimental system is designed to be 0.8mm. Even though there are some methods for linearization and these give the effectivity for the levitation controls, the method presented here is also another effective one which does not use linearization for magnetic force. Appropriateness of this idea is prooved by experimental results.
社団法人電気学会の論文