三硫化アンチモンの真空蒸着

概要

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Antimony trisulfide was evaporated in vacuum.<BR>The possibility of its thermal dissociation during evaporation was discussed. And it was revealed that the thermal dissociation of antimony trisulfide rarely occurred in the temperature range from 450 to 700°C where antimony trisulfide was usually evaporated.<BR>Therefore, the composition of evaporated films could be closely controlled. So the author varied the composition of the evaporated films in 71.6 to 78wt. % Sb by evaporating the mixture of antimony and antimoney trisulfide, and studied the properties of these films. And it was shown that the photoconductive properties such as dark resistance, photoconductive time lag, and spectral response, of these films largely depended on the film composition.<BR>Finally, the effects of the depostion conditions on film properties were investigated. It was consequently shown that the effects of the deposition conditions on the physical properties of the films were negligible, especially on the photoconductive properties of them.
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