イオン衝撃による絶縁物からの二次電子放出

概要

論文の詳細を見る
The characteristics of secondary electron emission from glass surface by Ar<SUP>+</SUP> ions were investigated experimentally. The yields of glass and quartz microsheets were larger than that of stainless steel. It was first observed that Field Enhanced Emission and Self Sustained Emission were caused by the surface charge. Because increasing of the yield is technological demand, HF etching and sandblast were attempted as one of the means of increasing yield. Then the yields of etched and sandblasted samples were about two times larger than that of non-etched or non-sandblasted sample. Field Enhanced Emission and Self Sustained Emission can not be interpreted only with kinetic ejection or potential emission theory. We proposed a simple model that the work function decreases by the band bending with the accumulation of positive charge near the surface.
日本真空協会の論文