ため込み式マクラウド真空計

概要

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In the previous paper, it is reported that it is impossible, due to a lack of reproducibility of the capillary depression, to measure pressures accurately in the range of 10-5 Torr with the McLeod gauge without remarkably increasing the volume of the compression bulb. However, the construction of a gigantic McLeod gauge having the bulb volume more than about 2, 000 cm3 is presumably impracticable. A new gauge devised here consists of two bulbs of about 1, 000 cm3 each in volume, one of which is used for art ordinary gauge, and the other for accumulating the gas into the ordinary, bulb as the Toepler pump. (the gauge is illustrated in Fig. 3.) Pn, the pressure after the n th accumulation of gas, is, given by Pn/P = bn+ab (1-bn) /VM (1-b) …… (5) where a = VT + VBD ; b VM/ (VM + υ BD+ υ DC); P is the pressure to be measured in the system ; VM is a bulb volume above C ; and VT is a volume between A and B. The result have revealed that the pressure measurements can be made with accuracies of ± 4% at 1 × 105 Torr and ± 6% even at 6 ×10-6 Torr. The achievement of this paper shows an improvement on the accuracy of the standard McLeod gauge which has been installed as the Vacuum Standard in the Electrotechnical Laboratory.
日本真空協会の論文