分子線蒸着装置の試作

概要

論文の詳細を見る
An apparatus consisting of two main parts has been constructed for molecular beam deposition. One part of the apparatus, intended for the studies of growth kinetics and crystal structure, is equipped with shelves (on which several substrates are placed), Knudsen cells, a cryostat and a quadrupole mass spectrometer. The other part, which is intended for the measurement of electrical properties, is equipped with a cryostat, point-probes and a magnet. The substrates can be smoothly transferred from the shelves to cryostats, because ball bearings are used and the surfaces of the movable parts are coated with Au by ion-plating.
日本真空協会の論文