マイクロプローブオージェ電子分光装置

概要

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The design and performance of a new Electron Microprobe Auger Spectrometer (EMAS) with the capability of UHV scanning electron microscope (SEM) is described. The incident electron beam from a W-hairpin cathode is focused by a magnetic lens system, and spatial resolution is below 0.5 μm for the Auger analysis mode and on the order of 100 Å in the SEM mode. The vacuum of the specimen chamber is kept at 10-9 Torr order during Auger analysis. Furthermore, an improvement of a spatial resolution is made to 700 Å by replacing W-hairpin cathode to a LaB6 cathode and introducing a pulse counter and signal processor in place of a conventional lock-in amplifier. Several examples of application are presented demonstrating the performance.
日本真空協会の論文