超高真空質量分析計 (II) : 金属製超高真空装置の問題点および高真空中の残留ガスについて
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概要
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By means of the low background mass spectrometer, as previously reported, we could study several problems encountered in ultra high vacuum techniques. Structural elements of metal high vacuum system, behaviour of the getter ion pump, and components of residual gases were investigated. This paper describes some experimental results since the previous reports.
- 日本真空協会の論文
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関連論文
- 超高真空質量分析計 (II) : 金属製超高真空装置の問題点および高真空中の残留ガスについて
- The Study on a Secondary Electron Multiplier Tube(II)
- The Study on a Secondary Electron Multiplier Tube(III)
- Low Background Mass Spectrometer
- Vacuum Technique
- Mass Spectrometer Type Leak Detector
- Ultra High Vacuum Mass Spectrometer II.:Behavior of Getter Ion Pump and Ionization Gauge under Static Operations
- Vacuum Technique V.