Ultra High Vacuum Mass Spectrometer II.:Behavior of Getter Ion Pump and Ionization Gauge under Static Operations

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概要

• 論文の詳細を見る

• The results of the preliminary work on the ultra-high vacuum mass spectrometer were discribed in the previous paper. After that, several reforms have been made in order to improve the end vacuum and the sensitivity of the mass spectrometer. The pressure of the order of 10<SUP>-9</SUP> mmHg was attained and the ion current of the order of 10<SUP>-18</SUP> A could be measured. Concerning with pumping action of the ion pump and the ionization gauge, variations of the residual peak heights with time were investigated in the closed vacuum system. From the results of the analyses of residual gases at the end vacuum, N2, CO, Ar, CH4, CO2, H2O and hydrocarbons(C<SUB>1</SUB>-C<SUB>4</SUB> groups)were observed.

• 日本質量分析学会の論文

著者

• 後藤 正之

  三菱電機株式会社伊丹研究所

関連論文

• 超高真空質量分析計 (II) : 金属製超高真空装置の問題点および高真空中の残留ガスについて
• Low Background Mass Spectrometer
• Vacuum Technique
• Mass Spectrometer Type Leak Detector
• Ultra High Vacuum Mass Spectrometer II.:Behavior of Getter Ion Pump and Ionization Gauge under Static Operations
• Vacuum Technique V.

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