マイクロ波プラズマ化学気相合成法による燃料電池用固体電解質薄膜の作製条件の検討

概要

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A thin zirconia electrolyte film using solid oxide fuel cell (SOFC) was prepared on the porous Al203 substrate by the microwave plasma-enhanced chemical vapor deposition (PECVD) using two organometallic compounds of zirconium acetylacetonate and zirconium tetra-n-butylate. Zr electrolyte film was characterized based on dependence on annealing treatment and substrate temperature. The grain size of a thin electrolyte film grown using zirconium tetra-n-butylate became small compared with that of zirconium acetylacetonate. As-deposited electrolyte film grown using two organometallic compounds indicated the columnar structure and but were deformed to crystal structure with a large crack or pore occurred at grain boundary in film by annealing treatment of 400°C. Furthermore, it is also found that a pore size in film reduced by crystal growth at a higher substrate temperature.
日本真空協会の論文
2003-03-20