電子サイクロトロン共鳴プラズマ化学気相成長法を用いて作製した燃料電池用ジルコニア薄膜の亀裂・空隙の形成抑制

概要

論文の詳細を見る
Formation mechanism of a crack and pore occurred in zirconia electrolyte film having solid oxide fuel cell, that the film prepared by the microwave plasma-enhanced chemical vapor deposition, was studied based on dependence on annealing treatment and substrate temperature. It is found that a crack and pore is restrained at annealing treatment in a vacuum, although it occurs in atmospheric. A crack is formed at grain boundary by occurrence of pore in the film, and a large crack observes at a higher substrate temperature. Moreover in the film prepared without substrate heating, a crack and pore did not also occur at annealing treatment. As a result, it is supposed that formation of a crack and pore is occurred at getting oxygen gas or moisture in atmospheric into the film.
日本真空協会の論文
2005-06-20