磁場印加型高周波プラズマ装置によるプラズマ重合薄膜

概要

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A magnetically enhanced-plasma reaction system for plasma polymerization, which was able to operate at low pressure below 10-2 Pa, was made. And influences of system pressure and RF power on plasma polymerization reactions of organometallic complex (Al-acethyl-acetone) were investigated. The plasma polymerization processes were influenced by the system pressure and the magnitude of RF power to maintain a glow discharge : e.g., IR spectra from the plasma polymers prepared at high system pressure showed broad absorption peaks in 500 cm-1700 cm-1 and 700 cm-11200 cm-1, and two weak absorptions near 1500 cm-1 (v (C =O), v (C = C)). The plasma polymers prepared at low pressure increased in absorptions intensity at 500 cm-1 v (Al-O), v (C-CH3), 750 cm-1 π (CH), and 900 cm-1 v (C =O), v (C = C). The plasma polymerization at low pressure (10-2 Pa) yield plasma polymers not to subject to plasma injury. The results obtained in this study points out that the system pressure as well as the magnitude of RF power may be an important factor to controll the chemical composition of plasma-polymerized polymers.
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