VLSIと結晶

概要

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Correlation between VLSI and crystal technology is comprehensively reviewed for crystallogra-phers who are not necessarily familiar to semiconductor devices. Questions such as “Why are VLSI devices produced by high-quality CZ Si single crystals?”and“Why is an epitaaial wafer necessary for VLSI?”are answered. Importance of wafer flatness in the fabrication of VLSI devices, and microdefects in CZ Si and their application to intrinsic gettering are also included. Moreover, it is emphasized that advanced techniques of material characterization, which will be indispensable to VLSI in the near future, are earnestly desired in the VLSI field. [J. Cryst. Soc. Jpn. <B>28</B>, <I>72</I> (1986) ] .
日本結晶学会の論文