Design and synthesis of mesoporous ZrO2 thin films using surfactant Pluronic P123 via sol–gel technique
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概要
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Mesoporous ZrO2 thin films were fabricated via sol–gel technique by introducing a surfactant, Pluronic P123. The mesoporous structure was tailored by altering several key processing variables including calcination temperature and heating rate. The samples prepared were characterized systematically with X-ray diffraction and electron microscopy. The pore size of the mesoporous ZrO2 synthesized was ca. 8 nm and the corresponding thin film thickness was ca. 60 nm. It was found that at a relatively high heating rate, the mesoporous ZrO2 produced had partially-ordered mesoporous structure and its wall structure was semi-crystalline. A mechanism was proposed for this structure formation.
著者
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Lockman Zainovia
School of Materials & Mineral Resources Engineering,Universiti Sains Malaysia, Engineering Campus
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Muto Hiroyuki
Department Of Materials Science Faculty Of Engineering Toyohashi University Of Technology
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Matsuda Atsunori
Department Of Materials Science Toyohashi University Of Technology
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SOO Mun
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology
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KAWAMURA Go
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology
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CHEONG Kuan
School of Materials and Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia
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NOOR Ahmad
School of Materials and Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia
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MATSUDA Atsunori
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology
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MUTO Hiroyuki
Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology
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LOCKMAN Zainovia
School of Materials and Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia
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