マグネトロンスパッタリング用強磁性体ターゲットの使用効率向上

概要

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Relationship between efficiency and magnetic properties of ferromagnetic Co base and Ni-18Fe targets for planar magnetron sputtering has been studied.Lowering the permeability of the targets increased and expanded the leakage magnetic field above target surface, which could give advantages of wide erosion and the increase in thickness of the targets.In Co-30Ni-7.5Cr (at%), for example, the efficiency in total volume of the low permeability target (W type) with μmax=70 was two times larger than that of conventional high permeability one (N type) with μmax=500.As the permeability of the targets was lowered, the increase of the half width value of X-ray diffraction peak was observed, which could be attributed to the inhomogeneos residual stress.Consequently, the decline in permeability is explained in terms of the magneto-elastic effect coupled the residual stress with magnetostriction.
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