A Computational Study of the Decomposition of Carbon Tetrafluoride in Wet Argon under Electron Beam Irradiation
スポンサーリンク
概要
- 論文の詳細を見る
In this study, a computational method of the kinetic model of carbon tetrafluoride (CF4) in wet argon gas under electron beam irradiation was developed. Using this method, the mechanism of decomposition and the optimum concentration of H2O during decomposition of CF4 was determined. It was found that 99% of 1000 ppm of CF4 of in atmospheric-pressure argon gas decomposed at an input energy density of 1 J/cm3 .
- 社団法人 プラズマ・核融合学会の論文
著者
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KATO Susumu
National Institute of Advanced Industrial Science and Technology
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TAKAHASHI Eiichi
National Institute of Advanced Industrial Science and Technology
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MATSUMOTO Yuji
National Institute of Advanced Industrial Science and Technology
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OKUDA Isao
National Institute of Advanced Industrial Science and Technology
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OKUDA Isao
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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TAKAHASHI Eiichi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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KATO Susumu
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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