Effects of Post Quenching on Mechanical Properties of TiN Film Coated on Steel Substrate
スポンサーリンク
概要
- 論文の詳細を見る
Carbon tool steel substrates were quenched after TiN coating by dc magnetron sputtering, and the effects of substrate post-quenching on the mechanical properties of TiN films were investigated. The residual stress of TiN film was decreased by substrate post-quenching, and the hardness of TiN film also decreased. On the other hand, the adhesive strength determined by the scratch test and the substrate hardness were improved by substrate post-quenching. The improvement in the adhesive strength could be explained by the following three effects of substrate post-quenching: decrease of residual stress, increase in substrate hardness, and the formation of a diffusion layer between the film and the substrate caused by the elevated temperature in substrate post-quenching.
- 一般社団法人 日本機械学会の論文
著者
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Tanabe Hirotaka
Department Of Mechanical Systems Engineering School Of Engineering University Of Shiga Prefecture
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Miyoshi Yoshio
Department Of Mechanical Systems Engineering School Of Engineering University Of Shiga Prefecture
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Takamatsu Tohru
Department Of Mechanical And Control Engineering University Of Electro-communications
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SAGARA Shuichi
Graduate Student, Graduate School of Engineering, The University of Shiga Prefecture
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INOUE Eiichi
North Eastern Industrial Research Center of Shiga Prefecture
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KONDO Kazuo
EISEN
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