AN OPTICAL METHOD TO DETECT AMOUNT OF PARTICLES DEPOSITED ON A SUBSTRATE
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概要
- 論文の詳細を見る
It is examined whether the principle of reflectometry, developed to measure the thickness of a thin layer on a surface, is applicable to detecting quantitatively the amount of fine particles deposited on a substrate. It is found that the relative difference of parallel and perpendicular components of the laser beam reflected on the surface is proportional to the particle coverage if experimental conditions are suitably selected, and that this principle is able to be used to detect with high sensitivity in-situ the amount of particles.
- 社団法人 化学工学会の論文
著者
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東谷 公
京都大学工学研究科
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東谷 公
Department Of Chemical Engineering Kyoto University
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Higashitani Ko
Department Of Applied Chemistry Kyushu Institute Of Technology:(present Address)department Of Chemic
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YASUMURA Kimihiko
Department of Chemical Engineering, Kyoto University
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MAKI Takamasa
Department of Chemical Engineering, Kyoto University
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Higashitani Ko
Department Of Applied Chemistry Kyushu Institute Of Technology
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Maki Takamasa
Department Of Chemical Engineering Kyoto University
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Yasumura Kimihiko
Department Of Chemical Engineering Kyoto University
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